What are the common types of vacuum pumps?


Time:

2022-07-08

There are many types of vacuum pumps, which can be divided into: gas delivery pump and gas capture pump according to the working principle; according to the degree of vacuum, it can be divided into: rough vacuum degree, high vacuum degree and ultra-high vacuum degree. According to the working principle: 1. Gas delivery pump: 1. Variable volume vacuum pump 1) Reciprocating 2) Rotary vane type: (1) Oil seal type: rotary vane, spool valve type, fixed plate type, trochoid type, multi-chamber rotary vane type; (2) Dry screw; (3) Liquid ring type; (4) Roots vacuum pump; 2. Momentum transmission pump 1) Molecular vacuum pump: traction molecular pump, turbo molecular pump, compound molecular pump; 2) Jet vacuum pump: liquid jet vacuum pump, gas jet vacuum pump, steam jet vacuum pump; 3) Diffusion pump: self-purification diffusion pump, fractionation diffusion pump; 4) Diffusion jet pump; 5) Ion transport pump; 2. Gas capture pump 1. Adsorption pump; 2. Getter pump; 3. Getter ion pump: evaporation ion pump, sputtering ion pump; 4. Cryogenic pump;

What are the common types of vacuum pumps?

There are many types of vacuum pumps, which can be divided into: gas delivery pump and gas capture pump according to the working principle; according to the degree of vacuum, it can be divided into: rough vacuum degree, high vacuum degree and ultra-high vacuum degree.

According to the working principle:

1. Gas delivery pump:

1. Variable volume vacuum pump

1) Reciprocating

2) Rotary vane type:
(1) Oil seal type: rotary vane, spool valve type, fixed plate type, trochoid type, multi-chamber rotary vane type;
(2) Dry screw;
(3) Liquid ring type;
(4) Roots vacuum pump;

2. Momentum transmission pump

1) Molecular vacuum pump: traction molecular pump, turbo molecular pump, compound molecular pump;

2) Jet vacuum pump: liquid jet vacuum pump, gas jet vacuum pump, steam jet vacuum pump;

3) Diffusion pump: self-purification diffusion pump, fractionation diffusion pump;

4) Diffusion jet pump;

5) Ion transport pump;

2. Gas capture pump

1. Adsorption pump;

2. Getter pump;

3. Getter ion pump: evaporation ion pump, sputtering ion pump;

4. Cryogenic pump;